サーフェスプロファイラー Surface Profiler
KLA-Tencor/ P-16+
基板やレンズなどの表面をダイアモンドの針でなぞり、表面の粗さ、段差、微小なうねり、全体の形状を測定し、2次元及び3次元解析を行う装置。最大サンプルサイズ 200mm、段差測定再現性 1ナノメータ以下。
This equipment traces the surface of a substrate or lens with a diamond needle, measuring the whole shape including surface roughness, differences in height, and minute swellings, performing two and three-dimensional analysis. The maximum sample size is 200 mm, and height difference measurement reproducibility is down to 1 nm or smaller.
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